JPS6322743U - - Google Patents
Info
- Publication number
- JPS6322743U JPS6322743U JP11732986U JP11732986U JPS6322743U JP S6322743 U JPS6322743 U JP S6322743U JP 11732986 U JP11732986 U JP 11732986U JP 11732986 U JP11732986 U JP 11732986U JP S6322743 U JPS6322743 U JP S6322743U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- hole
- wall surface
- view
- cleaning jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 238000011109 contamination Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Packaging Frangible Articles (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11732986U JPS6322743U (en]) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11732986U JPS6322743U (en]) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322743U true JPS6322743U (en]) | 1988-02-15 |
Family
ID=31002739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11732986U Pending JPS6322743U (en]) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322743U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010505272A (ja) * | 2006-09-29 | 2010-02-18 | ラム リサーチ コーポレーション | 基板処理メニスカスによって残される入口マークおよび／または出口マークを低減させるためのキャリア |
| CN109701930A (zh) * | 2018-11-30 | 2019-05-03 | 南安市博铭工业设计有限公司 | 减少刮痕和水痕的晶圆清洗承托装置 |
-
1986
- 1986-07-29 JP JP11732986U patent/JPS6322743U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010505272A (ja) * | 2006-09-29 | 2010-02-18 | ラム リサーチ コーポレーション | 基板処理メニスカスによって残される入口マークおよび／または出口マークを低減させるためのキャリア |
| CN109701930A (zh) * | 2018-11-30 | 2019-05-03 | 南安市博铭工业设计有限公司 | 减少刮痕和水痕的晶圆清洗承托装置 |